This publication provides recommendations that form the basis for the safe storage, handling, and use of electronic specialty gases that are packaged in containers. This information on potential hazards of these gases, containers and gas supply systems also includes directions for handling problem containers.
The information contained in this publication is designed to provide awareness and guidance for personnel working facilities that package, distribute, and use gases primarily in the electronic industry such as the manufacture of semiconductors, thin film transistor-liquid crystal display (TFT-LCD), fiber optics, opto-electronic devices, and solar cells.
The information in this publication is not meant to take the place of work instructions or standard operating procedures (SOPs), but rather to assist personnel to identify generic steps that need to be taken in their routine operations as well as to recognize issues that could result in injury to personal or damage to equipment.
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