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IEST RP-CC022.2

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Electrostatic Charge in Cleanrooms & Other Controlled Environments
Recommended Practice by Institute of Environmental Sciences and Technology, 01/28/2004

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Description

This RP discusses methods for specifying and evaluating the effectiveness of techniques for controlling electrostatic charge. The document describes typical control systems and their applications, and lists methods of testing and measurement of charge generation, charge neutralization, resistivity of surfaces and materials, and static field attenuation.

Product Details

Published:
01/28/2004
ISBN(s):
9781877862885
Number of Pages:
32
File Size:
1 file , 920 KB